Journal of Vacuum Science and Technology B

SJR Rank #15,345H-index: 131SJR: 0.359Best quartile: Q3
Journal website: aims, scope and author guidelines
Publisher

AVS Science and Technology Society

Country

United States

Type

journal

SJR by Edition

2022202500.10.20.30.4

Subject Categories

  • Condensed Matter PhysicsQ3
  • Electrical and Electronic EngineeringQ3
  • Electronic, Optical and Magnetic MaterialsQ3
  • InstrumentationQ3
  • Materials ChemistryQ3
  • Process Chemistry and TechnologyQ3
  • Surfaces, Coatings and FilmsQ3

Areas: Chemical Engineering · Engineering · Materials Science · Physics and Astronomy

Most published research topics

Semiconductor materials and devicesAdvancements in Photolithography TechniquesIntegrated Circuits and Semiconductor Failure AnalysisGaN-based semiconductor devices and materialsNanofabrication and Lithography TechniquesZnO doping and propertiesIon-surface interactions and analysisNanowire Synthesis and ApplicationsSemiconductor Quantum Structures and DevicesAdvancements in Semiconductor Devices and Circuit Design

Source: OpenAlex

Publication Statistics

2025 Docs3-Year DocsCitable Docs0150300450600

Documents per Year

2022202504590135180

Detailed Information

ISSN

2166-2746, 2166-2754

SJR Best Quartile

Q3

Region

Northern America

Citations per Document (2 years)

1.55

References per Document

32.79

Coverage

1991-1992, 2009-2026

Scope

No scope description available yet.

Metrics from SCImago Journal Rank 2025. View on SCImago