IEEE Transactions on Semiconductor Manufacturing

SJR Rank #10,304H-index: 87SJR: 0.575Best quartile: Q2APC: US$2,645
Journal website: aims, scope and author guidelines
Publisher

Institute of Electrical and Electronics Engineers Inc.

Country

United States

Type

journal

SJR by Edition

2022202500.30.60.91.2

Subject Categories

  • Condensed Matter PhysicsQ2
  • Electrical and Electronic EngineeringQ2
  • Electronic, Optical and Magnetic MaterialsQ2
  • Industrial and Manufacturing EngineeringQ2

Areas: Engineering · Materials Science · Physics and Astronomy

Most published research topics

Industrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devicesManufacturing Process and OptimizationAdvancements in Photolithography TechniquesAdvancements in Semiconductor Devices and Circuit DesignScheduling and Optimization AlgorithmsSilicon and Solar Cell TechnologiesAdvanced Surface Polishing TechniquesVLSI and Analog Circuit Testing

Source: OpenAlex

Publication Statistics

2025 Docs3-Year DocsCitable Docs060120180240

Documents per Year

202220250306090120

Detailed Information

ISSN

0894-6507, 1558-2345

SJR Best Quartile

Q2

Region

Northern America

Citations per Document (2 years)

2.75

References per Document

27.23

Coverage

1988-2026

Scope

The IEEE Transactions on Semiconductor Manufacturing addresses the challenging problems of manufacturing complex microelectronic components, especially very large scale integrated circuits (VLSI). Manufacturing these products requires precision micropatterning, precise control of materials properties, ultraclean work environments, and complex interactions of chemical, physical, electrical and mechanical processes.

Metrics from SCImago Journal Rank 2025. View on SCImago